Uncertain multi-objective decision framework is proposed for capacity planning. Manufacturers have to determine capital investments based on various demand forecasts of products in advance for long lead time in manufacturing process. Rapid development in semiconductor technology makes it difficult for companies to estimate future tool requirement especially for new-generation products planning decisions. An empirical study was conducted for validation and the results showed practical viability of the proposed approach. The proposed model performs better than existing approach in minimizing the capacity cost loss…